ZL92 Fluoropolymer Pressure Transducer

The Ashcroft® ZL92 is a pressure transducer designed for use in semiconductor processes that require fluoropolymer (PTFE/PFA) wetted parts for improved chemical compatibility for use in corrosive gases and fluids. A secondary isolation diaphragm and vent design isolates the ceramic sensing element from corrosive gases and liquids which extends the life span of the transducer.

Key Features:
  • PTFE/PFA wetted parts
  • Corrosion resistant to chemicals such as hydrofluoric acid
  • Low metal ion elution
  • Compatible with pipe diameters from 0.25 to 0.5 in. O.D.
  • Capacitance sensor for excellent thermal stability
  • Multiple mounting options include tube connections, press fit nuts, flared nuts and threaded nuts
  • Class 100 cleanroom packaged and double bagged
Applications:

Cleaning equipment for semiconductor
Cleaning equipment for Flat Panel Displays (FPD)
Wet stations
Chemical supply systems

Specifications

Certifications & Approvals

Datasheets & Instruction Manuals

Drawings

Resources & Tools

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