Importance of Pressure Measurement in Semiconductor Manufacturing
Today, semiconductor manufacturing operations rely on the precise and accurate delivery of ultra-high purity (UHP) gases, which require purity levels to exceed 99.9995% and stringent control over stray particles and moisture. Given the importance of UHP gas supply systems, the measurement and control technologies utilized for their distribution must offer high-precision, high-accuracy performance while maintaining absolute cleanliness inside the system. Construction materials must remain inert when in contact with the UHP gases, minimize the risk of trapped (dead) volume, and prevent particle shedding and entrapment.
While essential to the manufacture of modern semiconductors, the toxicity and flammability of UHP gases pose significant risks to the health and well-being of those handling them. For this reason, some devices used in semiconductor operations are required to comply with leak integrity and hazardous location specifications and standards (e.g., ATEX and IECEx) to assure user safety.