

Pressure measurement for semiconductor manufacturing
Optimize safety and performance with specialized high-purity instrumentation
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Ultrapure and Deionized Water Etching
Wet Processing and Etching, Dry Etching and Plasma Ashing, Chemical Vapor Deposition,
Ultrapure/Deionized Water Facilities

ZL91
Pressure Transducer

ZL95 Pressure Transducer
with Display

ZL92 Pressure Transducer

HPT - 63 mm
Pressure Gauge
View Data Sheet
High-Purity Gas Panel and Gas Delivery Systems
Gas Panels, Hazardous Gas Pressure Measurement, Hydrogen Pressure Measurement, Cleanroom Pressure Measurement

ZT12 High Purity pressure transmitter
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ZX12 High Purity pressure transmitter
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ZT16 High Purity pressure transmitter
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40/50 & 63 mm PHX high purity pressure gauge
Pressure Gauge
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50 mm PHS high-purity pressure gauge with reed switch
Pressure Gauge
View Data Sheet

28 mm HPX miniature
high-purity pressure gauge
View Data Sheet
Cleanroom & Critical Air Pressure Monitoring

GXLdp Differential
Pressure Transducer

CXLdp Differential
Pressure Transducer

DXLdp Differential
Pressure Transducer

GC30 Differential Pressure Transducer
with Switch Outputs
Explore helpful content to understand the key considerations involved in chemical process

How to Select a UHP Pressure Gauge for Semiconductor Applications (resource)

How do I select a Pressure Transducer for Semiconductor UHP Gas Applications (resource)

Harsh Semiconductor Applications Guide (resource)

Product Review: ZL91 and ZL92 Pressure Transducer for Semiconductor Applications (resource)

Product Review: HPT Pressure Gauge for Semiconductor Applications (resource)

What Factors Make the Best Pressure Transducer for Semiconductor? (resource)

Be confident in your semiconductor system performance
Speak to an industry expert to learn how to ensure safety and efficiency for your applications.